JPH0414489U - - Google Patents
Info
- Publication number
- JPH0414489U JPH0414489U JP5521390U JP5521390U JPH0414489U JP H0414489 U JPH0414489 U JP H0414489U JP 5521390 U JP5521390 U JP 5521390U JP 5521390 U JP5521390 U JP 5521390U JP H0414489 U JPH0414489 U JP H0414489U
- Authority
- JP
- Japan
- Prior art keywords
- pair
- conductors
- electrostatic
- adsorption layer
- adsorption device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001179 sorption measurement Methods 0.000 claims description 12
- 239000004020 conductor Substances 0.000 claims description 8
- 238000010586 diagram Methods 0.000 description 5
Landscapes
- Jigs For Machine Tools (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990055213U JP2516020Y2 (ja) | 1990-05-25 | 1990-05-25 | 静電吸着装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990055213U JP2516020Y2 (ja) | 1990-05-25 | 1990-05-25 | 静電吸着装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0414489U true JPH0414489U (en]) | 1992-02-05 |
| JP2516020Y2 JP2516020Y2 (ja) | 1996-11-06 |
Family
ID=31577963
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1990055213U Expired - Lifetime JP2516020Y2 (ja) | 1990-05-25 | 1990-05-25 | 静電吸着装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2516020Y2 (en]) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6164637A (ja) * | 1984-09-07 | 1986-04-03 | Fuji Xerox Co Ltd | 給紙装置 |
-
1990
- 1990-05-25 JP JP1990055213U patent/JP2516020Y2/ja not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6164637A (ja) * | 1984-09-07 | 1986-04-03 | Fuji Xerox Co Ltd | 給紙装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2516020Y2 (ja) | 1996-11-06 |